Index of Measures

3D surface metrology
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Optical Profiler

Institute of Technical Physics

· Veeco NT9100 profiler, vertical scanning interferometry (VSI) and phase shifting interferometry (PSI) · Objectives: 2.5X, 10X und 50X, motorized turret · „Stitching“ for measurements over large lateral areas · Auto stages for sample positioning, travel range: z: 100 mm, x,y: 150 mm · Vertical Measurement: 0.1 nm bis 10 mm.

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