Index of Measures

dimension measurement
 
 
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Focused Ion Beam / Dual Beam (FIB)

DLR Institute of Materials Research

The Focused Ion Beam/Dual Beam (FIB/SEM) is a highly versatile tool in the field of materials research. It consist of a fully equipped scanning electron microscope (SEM) incorporating a scanning ion beam column. The latter one allows imaging of the surface of the samples by ion induced secondary electrons as well as by secondary ions. Depending on the selected beam parameters, the focused ion beam is used to remove material from the sample.

 
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