Optical Profiler

Measured values

  • 3D surface metrology

Principle

  • Veeco NT9100 profiler, vertical scanning interferometry (VSI) and phase shifting interferometry (PSI)
  • Objectives: 2.5X, 10X und 50X, motorized turret
  • „Stitching“ for measurements over large lateral areas
  • Auto stages for sample positioning, travel range: z: 100 mm, x,y: 150 mm
  • Vertical Measurement: 0.1 nm bis 10 mm

Application

Non-contact 3D surface metrology of super-smooth to very rough samples, analysis software for surface parameters e.g., roughness, flatness, volume

Literature / References

  • Infobroschüre: http://www.veeco.com/pdfs/brochures/B506-Rev_A7-Wyko_NT_Series_Optical_Profilers-Brochure_(HiRes).pdf
  • Weitere Infos: http://www.veeco.com/pdfs/webinar-slides/A-First-Look-at-NT9080-webinar-slides-100408.pdf

Institute / Organization

DLR Institute of Technical Physics

Contact

Stephanie Karg
DLR Institute of Technical Physics

Dr. phil. nat. Dorothee Maria Rück
Technology Marketing

Similar Measures

Subsequent references to data sheets are given which describe with high probability similar measured values. The selection is made on the basis of semantic affinity:

3D surface metrology :: more